| Specifications | Manufacturing Limits |
| Processing Workcrafts | Magnetorheological Polishing(MRF) |
| Diameter | ≤600mm (± 0.010mm) |
| Length | ≤1000mm (± 0.010mm) |
| Width | ≤600mm (± 0.010mm) |
| Thickness | ≤200mm (± 0.01mm) |
|
Magnetorheological Polishing
(MRF) Accuracy |
R MS≤5nm |
| P ositioning Accuracy | ± 0.005mm |
| Repositioning Accuracy | ± 0.002mm |
| Movement Controlling Method | 6-axis linkage |
| X Stroke Size | 0 -1000mm |
| Y Stroke Size | 0 -600mm |
| Z -axis Stroke Size | 0 -300mm |
| A -axis Rotary Angle | -35° ~ +35° |
| B -axis Rotary Angle | -35° ~ +35° |
| C-axis Rotary Angle | ±360° |
| Materials For Processing |
Fused silica / fused quartz/Silicon/CaF2/BaF2/ZnS/ZnSe
Optical glass, silicon, infrared materials, YAG, sapphire zerodur, soft materials such as Si, CaF2, ZnSe, hard materials such as RB SiC, s-sic, KDP crystal processing, metal mirrors, etc; |
| Processing Shapes | Planar, spherical, aspheric, ultrathin, cylindrical, off-axis, free-form surface |