3D Manual Vision Measuring Machine for Semiconductor Manufacturing

Model NO.
iMS-3020
Z-Axis Accuracy
5.0+L/200(Um)
Contour Illumination
Infinitely Adjustable LED Cold Illumination
Net Weight
185kg
Dimension(mm)
838X667X1000
X/Y-Axis Travel
300X200mm
X/Y-Axis Accuracy
2.0+L/200(Um)
Z-Axis Travel
High-Precision Linear Guide,Effective Travel 200mm
Glass Table
356X248mm
Metal Table
458X358mm
Transport Package
Plywood
Specification
CE
Trademark
SINOWON
Origin
Dongguan
HS Code
90314910
Production Capacity
10 Set Per Month
Reference Price
Please contact us for quote
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Product Description

High Accuracy 3D Manual Vision / Video Measuring Machine
3D Manual Vision Measuring Machine for Semiconductor Manufacturing
Product Characteristic:
  1. Adopt high-precision granite base and column to ensure the stability and precision of the machine;
  2. Adopt high-precision toothless polished rod and fast-moving locking device to ensure that the return error of the table is within 2um;
  3. Adopt high-precision instrument optical ruler and precision worktable to ensure the accuracy of the machine is within ≤2.0+L/200um;
  4. Adopt high-definition zoom lens and high-resolution color digital camera to ensure clear picture quality without distortion;
  5. Using the program-controlled surface 4-ring 8-area LED cold illumination and Contour LED Parallel Illumination as well as a built-in intelligent light adjustment module, the area brightness of the light in the 4-ring 8-area can be freely controlled;
  6. iMeasuring Vision measurement software improves quality control to a new level;
  7. Optional contact probe and three-dimensional measurement software can be used to upgrade the machine to a contact three-dimensional measuring machine.
  8. It can be upgraded to install an autofocus function module to achieve accurate semi-automatic measurement.
  3D Manual Vision Measuring Machine for Semiconductor Manufacturing

Technical Specification:
High-Precision Manual Vision Measuring Machine   IMS-3020 Series
Commodity 2.5D  Vision Measuring Machine 3D Contact & Vision Measuring Machine 2.5D Semiautomatic Vision Measuring Machine 3D Semiautomatic Contact & Vision Measuring Machine
Product Type A: Optical   Zoom-lens  Sensor B: Zoom-lens Sensor and
Contact Probe Sensor 		C: Zoom-lens Sensor and
Z-axis
Autofocus Function 		D: Zoom-lens Sensor,
Contact Probe Sensor and Autofocus Function
Model iMS-3020A iMS-3020B iMS-3020C iMS-3020D
Code# 521-120G 521-220G 521-320G 521-420G
Measuring Software iMeasuring
Metal Workbench 458x358mm
Glass Workbench 356x248mm
X/Y axis travel 300x200mm
Z-axis travel High-precision linear guide, effective travel 200mm
X/Y/Z axis resolution 0.5um
Measurement Accuracy XY axis: ≤2.0+L/200(um)
  Z axis: ≤5.0+L/200(um)
Repeat Accuracy 2um
Pedestal and Uprights High Precision Granite
Illumination System(Software Adjustment) Surface 4 rings and 8 zones infinitely adjustable LED cold Illumination
  Contour LED Parallel Illumination
  Optional Coaxial Light
Digital Camera 1/2.9"/1.6Mpixel High Resolution Digital Camera
Zoom lens 8.3X High-Resolution Electronic feedback zoom lens
  Optical Magnification: 0.6X~5X times;
Video Magnification: 20X~170X
Operation System Support WIN 10/11-32/64 Operating System
Language English, Simplified Chinese, Traditional Chinese, Optional other language versions
Dimension  (WxDxH) 838x667x1000mm
Gross/Net Weight 275/185Kg

Standard Delivery:
 
Commodity Code# Community Code#
Measurement Software 581-451 Electronic Feedback Lens 911-133EF
Manual controller 564-301 4R/8D LED Illumination 425-121
0.5um Enclosed Grating Ruler 581-221 Dust Cover 521-911
Dongle 581-451 1/2.9" Digital Camera 484-131
Optical Calibration Plate 581-801 Data cable 581-931
Certificate, Warranty Card,  
Instruction, Packing List 		------ Contour LED Parallel Cold Illumination 425-131

Optional Accessories:
Commodity Code# Commodity Code#
Instrument Table 581-621 Electronic Feedback Coaxial Optical Lens 911-133EFC
3D Touch Probe 581-721 Calibration Ball 581-821
Computer and Monitor 581-971 1/1.8" Color Camera 484-123
Block Gauge 581-811 0.5X Additional Objective 423-050
Foot Switch 581-351 2X Additional Objective 423-200

Applicaiton:

Semiconductor Manufacturing: Wafers, front-ends, back-ends, and components
3D Manual Vision Measuring Machine for Semiconductor Manufacturing
Precision Metal Processing: Machining, Stamping, Powder Metallurgy Injection Molding
3D Manual Vision Measuring Machine for Semiconductor Manufacturing
Precision plastic
3D Manual Vision Measuring Machine for Semiconductor Manufacturing

 

 

Video Measuring System

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