| Model | IVS-100D | IVS-202D | IVS-302D | ||
| Measuring Range | X | φ100 | 200mm | 300mm | |
| Y | 200mm | 200mm | |||
| Z | 75mm | 75mm | 75mm | ||
| FOV | High-Precision Mode | 26mm X 18mm | |||
| Wide-Field Mode | φ 100mm | ||||
| Repeatability | High-Precision Mode | ± 1.5μm | |||
| Wide-Field Mode | ± 3μm | ||||
| Minimum Unit | 0.1μm | ||||
| Accuracy | High-Precision | Without Binding | ±1.5μm | ||
| With Binding | \ | ±2+L/150μm | ±2+L/150μm | ||
| Wide-Field | Without Binding | ±3μm | |||
| With Binding | \ | ±3+L/150μm | ±3+L/150μm | ||
| Weight | 33 Kg | 45 Kg | 50 Kg | ||
| Optical System | Camera | 1 " 20 MP BW Camera * 2 | |||
| Lens | Double Magnification Telecentric Lens | ||||
| Surface Light | Two-Ring Liftable Light | ||||
| Bottom Light | Green Parallel Bottom Light | ||||
| Capacity | 5 Kg | ||||
| Measuring Software | GD&T Software | ||||
| Power Supply | 220V±10%,50Hz | ||||
| Working Environment | Temperature: 20±3ºC, Humidity: 30-80%, Vibration: <0.002g,15HZ | ||||
| Dimension ( L*W*H) mm | 600*300*650mm | 600*410*650mm | 600*510*650mm | ||