Modell | Name des Gases | MENGE | Wasserkapazität | Betriebsdruck | Prüfdruck (bar) | ||
(EA) | (L) | (Bar) | |||||
Gewicht Gas (kg) | Gesamtgewicht (kg) | ||||||
TT04-1100 | SiH4, NH3 | 4 | 4.400 | 166/180/200 | 276~333 | 1.296 | 8.556 |
NF3, SF6 | |||||||
N20 , Mischgas | |||||||
(F2+N2 ), | |||||||
( PH3+H2 ) | |||||||
TT08-1100 | 8 | 8.880 | 166/180/200 | 276~333 | 1.296 | 13.740 | |
TT12-1100 | 12 | 13.200 | 166/180/200 | 276~333 | 1.433 | 20.621 | |
TT08-2250 | 8 | 18.000 | 166/180/200 | 276~333 | 2.780 | 26.611 | |
TT10-2395 | 10 | 23.950 | 166/180/200 | 276~333 | 1.900 | 26.597 |